Shape, size, and atomic composition analysis of nanostructures in 3D by Rutherford backscattering spectrometry
Zsolt Zolnai APPLIED SURFACE SCIENCE 0169-4332 1873-5584 2013 View on: MTMT: 30377751 | DOI: 10.1016/j.apsusc.2013.04.081 | REAL: 6487 | WoS: 000322064600004 | Scopus: 84880332338