In-Situ Control of Defect Dynamics By Ellipsometry During Ion Implantation – Evolution of Disorder and Cavity Structure in Single-Crystalline Ge During Implantation of Sb Ions

Tivadar Lohner, Attila Németh, Zsolt Zolnai, Benjamin Kalas, Alekszej Romanenko, Khánh Nguyen Quoc, Edit Szilágyi, Endre Kótai, Emil Agócs, Zs Tóth, J Budai, Péter Petrik, Miklós Fried, István Bársony, József Gyulai

SCIENTIFIC REPORTS 2045-2322
2021

View on: MTMT: 31797084 | DOI: 10.21203/rs.3.rs-132556/v1 | REAL: 119367 | Google scholar: 9857248034489844952