In-Situ Control of Defect Dynamics By Ellipsometry During Ion Implantation – Evolution of Disorder and Cavity Structure in Single-Crystalline Ge During Implantation of Sb Ions

Tivadar Lohner, Attila Németh, Zsolt Zolnai, Benjamin Kalas, Alekszej Romanenko, Khánh Nguyen Quoc, Edit Szilágyi, Endre Kótai, Emil Agócs, Zsolt Tóth, Judit Budai, Péter Petrik, Miklós Fried, István Bársony, József Gyulai

SCIENTIFIC REPORTS 2045-2322
2022

View on: MTMT: 31797084 | DOI: 10.21203/rs.3.rs-132556/v1 | REAL: 119367 | Google scholar: 9857248034489844952