Z. Baji et al: Enhancing the nucleation in atomic layer deposition: A study on vanadium sulfide and oxide layers Available to Purchase Special Collection: Atomic Layer Deposition (ALD)

Z. Baji et al: Enhancing the nucleation in atomic layer deposition: A study on vanadium sulfide and oxide layers Available to Purchase Special Collection: Atomic Layer Deposition (ALD)
Zsofia Baji,  Zsolt Fogarassy, Orsolya Hakkel; Zoltán Szabó

https://doi.org/10.1116/6.0004247