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N. Q. Khánh et al: The effect of substrate bias on the piezoelectric properties of pulse DC magnetron sputtered AlN thin films

2021-01-20T17:05:24+02:00November 13th, 2020|

We have shown by Piezoresponse Force Microscopy (PFM) that the quality of the deposited AlN layer depends strongly on the negative substrate bias, i.e., the energy transferred via the bombardment of the accelerated positive ions on the sample. November 13 2020: N. Q. Khánh et al: The effect of substrate bias on the piezoelectric properties of pulse DC magnetron sputtered AlN thin films published in Journal of Materials Science: Materials in Electronics 0957-4522 1573-482X View on: MTMT: 31787835 | DOI: 10.1007/s10854-020-04810-9 | WoS: 000588873600002 | REAL: 118823 | Scopus: 85096023345 | Google scholar hash: b32mWr70w_IJ [...]

Binderiya Oyunbolor and Zsolt Filep on the Students’ Scientific Conference (TDK)

2021-01-20T16:41:05+02:00November 12th, 2020|

…have been awarded a certificate of merit at the Experimental Physics Session of BME TDK. Binderiya Oyunbolor (supervisor: Nguyen Quoc Khánh), Reactive magnetron sputtering of AlN and ScAlN thin films for piezoelectric applications Zsolt Filep (supervisor: István Endre Lukács), Two-dimensional electron gas based electromechanical microsensors A well-deserved congratulation to all of them!

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