The influence of C3H8 and CBr4 on structural and morphological properties of 3C-SiC layer
G Attolini, M Bosi, BE Watts, Gábor Battistig, László Dobos, Béla Pécz MATERIALS SCIENCE FORUM 0255-5476 1662-9752 2012 View on: MTMT: 1805226 | DOI: 10.4028/www.scientific.net/MSF.711.22 | WoS: 000302673900004 | Scopus: 84856952291