Interpretation of hydrogen incorporation into radio frequency sputtered amorphous silicon based on Berg modelling
Nikolett Hegedüs, Riku Lovics, Miklós Serényi, Zsolt Zolnai, Péter Petrik, Csaba Balázsi, Katalin Balázsi VACUUM 0042-207X 1879-2715 2022 View on: MTMT: 32823205 | DOI: 10.1016/j.vacuum.2022.111164 | REAL: 142783 | WoS: 000805827500003 | Scopus: 85130157621 | Google scholar hash: w19Ye1gDJPIJ