P.L. Neumann et al.: AlGaN/GaN heterostructure based 3-dimensional force sensors Gallery P.L. Neumann et al.: AlGaN/GaN heterostructure based 3-dimensional force sensors Ferenc Braun2023-10-20T14:48:10+02:00January 3rd, 2023| https://doi.org/10.1016/j.mne.2023.100198