Highly conductive epitaxial ZnO layers deposited by atomic layer deposition

Zsófia Baji, Zoltán Lábadi, György Molnár, Béla Pécz, Kálmán Vad, Zsolt Endre Horváth, Péter János Szabó, T Nagata, János Volk

THIN SOLID FILMS 0040-6090
2014

View on: MTMT: 2596685 | DOI: 10.1016/j.tsf.2014.04.047 | REAL: 13307 | WoS: 000340658100077 | Scopus: 84901785130 | Google scholar: 6960486656451394165