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N. Q. Khánh et al: Quantitative Piezoresponse Force Microscopy for thin AlScN films deposited by pulse DC reactive magnetron co-sputtering

N. Q. Khánh et al: Quantitative Piezoresponse Force Microscopy for thin AlScN films deposited by pulse DC reactive magnetron co-sputtering

https://doi.org/10.1016/j.mssp.2023.107902

Ferenc Braun2023-10-20T12:18:32+02:00October 20th, 2023|

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