Relationship between structural changes, hydrogen content and annealing in stacks of ultrathin Si/Ge amorphous layers

C Frigeri, Miklós Serényi, Khánh Nguyen Quoc, Attila Csik, Ferenc Riesz, Zoltán Erdélyi, L Nasi, Dezső Beke, H-G Boyen

NANOSCALE RESEARCH LETTERS 1931-7573 1556-276X
2011

View on: MTMT: 1506007 | DOI: 10.1186/1556-276X-6-189 | WoS: 000290525700087 | DEA: 110568 | Scopus: 84255189981 | PubMed: 21711697