Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems
Péter Udvardi, János Radó, András Straszner, János Ferencz, Zoltán Hajnal, Saeedeh Soleimani, Michael Schneider, Ulrich Schmid, Péter Révész, János Volk MICROMACHINES 2072-666X 2017 View on: MTMT: 3282614 | DOI: 10.3390/mi8100311 | REAL: 66126 | WoS: 000414859000025 | Scopus: 85033444452 | PubMed: 30400501 | Google scholar: 4705944360456905347