Spectroellipsometric detection of silicon substrate damage caused by radiofrequency sputtering of niobium oxide
Tivadar Lohner, Miklós Serényi, Edit Szilágyi, Zsolt Zolnai, Zsolt Czigány, Khánh Nguyen Quoc, Péter Petrik, Miklós Fried APPLIED SURFACE SCIENCE 0169-4332 1873-5584 2017 View on: MTMT: 3146254 | DOI: 10.1016/j.apsusc.2016.11.232 | REAL: 42657 | WoS: 000408756700058 | Scopus: 85008177089 | Google scholar: 3305940398116640901