Gas sensing properties of very thin TiO2 films prepared by atomic layer deposition (ALD)
Stefan Ivanov Boyadjiev, Georgieva V, Vergov L, Zsófia Baji, Gáber F, Imre Miklós Szilágyi JOURNAL OF PHYSICS-CONFERENCE SERIES 1742-6588 1742-6596 2014 View on: MTMT: 2824169 | DOI: 10.1088/1742-6596/559/1/012013 | REAL: 20920 | WoS: 000346420600013 | Scopus: 84913580446 | Google scholar: 11699312523269444948